公开(公告)号：US20140231306A1

公开(公告)日：2014-08-21

申请号：US14185041

申请日：2014-02-20

Applicant: Samsung Display Co., Ltd.

Inventor： Ji-Eun KIM ,  Dong-Yoon SO ,  Han-Soo KIM

IPC: H01L21/673

CPC classification number: H01L21/67326 ,  B65D85/48 ,  H01L21/67369

Abstract: An apparatus for storing a substrate on which a pattern is formed includes a main body storing the substrate, a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate, a second pad neighboring the first pad and including a second groove supporting the center of the substrate, and a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate.

Abstract translation: 一种用于存储其上形成有图案的基板的设备包括：存储基板的主体;位于主体底部的第一垫，包括支撑基板一个边缘的第一凹槽，与第一垫相邻的第二垫 并且包括支撑所述基板的中心的第二凹槽和与所述第一焊盘间隔开的第三焊盘，所述第二焊盘设置在所述第一焊盘和所述第三焊盘之间，所述第三焊盘包括支撑所述衬底的另一边缘的第三槽。