公开(公告)号：US09835565B2

公开(公告)日：2017-12-05

申请号：US14746427

申请日：2015-06-22

Applicant: Samsung Display Co., Ltd.

Inventor： Wal jun Kim ,  JoongYoung Ryu ,  Seung-Young Baeck ,  Changhyun Ryu ,  Deok joo Lim

IPC: G01J4/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/84

CPC classification number: G01N21/8806 ,  G01N21/8422 ,  G01N21/95 ,  G01N2021/8427 ,  G01N2021/8848 ,  G01N2201/0683

Abstract: An inspection device of a display device includes a first illumination unit providing a first incident light to the display device at a first incident angle, a second illumination unit providing a second incident light to the display device at a second incident angle, a third illumination unit providing a third incident light to the display device at a third incident angle, and a defect detector receiving at least one of a first reflection light obtained from the first incident light reflected by the display device at a first reflection angle, a second reflection light obtained from the second incident light reflected by the display device at a second reflection angle, and a third reflection light obtained from the third incident light reflected by the display device at a third reflection angle to detect defects of the display device.