公开(公告)号：US20240226955A9

公开(公告)日：2024-07-11

申请号：US18234937

申请日：2023-08-17

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240131555A1

公开(公告)日：2024-04-25

申请号：US18234937

申请日：2023-08-16

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.