Abstract:
A work table for laser processing include a lower plate including a first area and a second area surrounding at least a portion of the first area, a first plate disposed in the first area on the lower plate and having a polygonal shape in a plan view, and a second plate disposed in the second area on the lower plate and movable in the second area.
Abstract:
A laser device includes a laser source which emits a laser beam, a scanner located on a path of the laser beam emitted from the laser source to control the path of the laser beam, a lens module located on a path of a controlled laser beam to converge the laser beam, and a lens adaptor connecting the lens module to the scanner. The lens module includes a first lens part which accommodates a first lens, a second lens part which accommodates a second lens, and a connecting part located between the first lens part and the second lens part, where the connecting part has a longest diameter greater than a longest diameter of the first lens part and a longest diameter of the second lens part.
Abstract:
A deposition substrate transferring unit that can deposit a deposition material at an exact location on a substrate, includes an electrostatic chuck that has a first surface to which a substrate is attached; and a carrier having a surface that combines with a second surface of the electrostatic chuck to move the electrostatic chuck in a first direction. The carrier includes accommodation parts disposed in empty space within the carrier, and supplementary ribs respectively formed on surfaces of the accommodation parts.