公开(公告)号：US11739420B2

公开(公告)日：2023-08-29

申请号：US16892415

申请日：2020-06-04

Applicant: Samsung Display Co., LTD.

Inventor： Hyosung Kim ,  JinYoung Choi ,  Sungmin Hur ,  Hyunsang Seo ,  Hyun-Ju Lee ,  Manjae Park ,  Nari Ahn ,  Hyeongsuk Yoo ,  Dongwon Han

IPC: C23C16/04 ,  H01L27/32 ,  C22C38/08 ,  H10K50/844 ,  H10K59/12 ,  H10K71/00 ,  H10K71/10

CPC classification number: C23C16/042 ,  C22C38/08 ,  H10K50/844 ,  H10K59/12 ,  H10K71/00 ,  H10K71/10 ,  H10K59/1201

Abstract: A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.