Laser Interferometer And Method Of Adjusting Optical Axis Of Laser Interferometer

    公开(公告)号:US20240384978A1

    公开(公告)日:2024-11-21

    申请号:US18664376

    申请日:2024-05-15

    Abstract: A laser interferometer includes an optical interference unit as a non-coaxial optical system including a laser source for emitting a laser beam, a light modulator for modulating a frequency of the laser beam to generate reference light, a light receiving element for receiving object light generated in response to irradiation of an object with the laser beam, and the reference light to output a received light signal, a first aperture element disposed on a light path entering the light receiving element, and for detecting a positional deviation of an optical axis of the object light from an optical axis of the reference light, and an angular deviation detection unit for detecting an angular deviation of the optical axis of the object light from the optical axis of the reference light based on the received light signal, and an instruction unit for issuing an instruction to change a relative arrangement between the optical interference unit and the object based on a detection result of the positional deviation and a detection result of the angular deviation.

    LASER INTERFEROMETER
    3.
    发明公开

    公开(公告)号:US20230266161A1

    公开(公告)日:2023-08-24

    申请号:US18169937

    申请日:2023-02-16

    Inventor: Kohei YAMADA

    CPC classification number: G01H9/00

    Abstract: A laser interferometer includes: a laser light source configured to emit first laser light; an optical modulator including a vibration element and configured to modulate the first laser light using the vibration element and generate second laser light including a modulation signal; a light receiving element configured to receive third laser light including a sample signal generated by the first laser light being reflected by an object and the second laser light, and output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal; and a correction circuit configured to detect a force acting on the vibration element from a change in vibration of the vibration element and correct the light reception signal based on the force.

    Laser Interferometer
    4.
    发明公开

    公开(公告)号:US20230168120A1

    公开(公告)日:2023-06-01

    申请号:US18070905

    申请日:2022-11-29

    CPC classification number: G01H9/00

    Abstract: A laser interferometer includes: a laser light source configured to emit first laser light; an optical modulator that includes a resonator and that is configured to modulate the first laser light using the resonator and to generate second laser light including a modulation signal; a photodetector configured to receive the second laser light and third laser light including a sample signal generated by reflecting the first laser light from an object to be measured, and to output a light reception signal; an optical coupler that has a function of splitting the first laser light and a function of splitting combined light of the second laser light and the third laser light; a first collimator configured to collimate the first laser light split by the optical coupler; a second collimator configured to collimate the first laser light split by the optical coupler; a first optical wiring; a second optical wiring; a third optical wiring; and a fourth optical wiring.

    BLOOD FLOW ANALYZER, BLOOD FLOW ANALYSIS METHOD, AND PROGRAM

    公开(公告)号:US20180303429A1

    公开(公告)日:2018-10-25

    申请号:US15945882

    申请日:2018-04-05

    CPC classification number: A61B5/7217 A61B5/0075 A61B5/0261

    Abstract: A blood flow analyzer includes a signal processing section which performs filter processing on a detection signal which indicates the intensity of a laser beam having passed through a blood vessel so that a component having a frequency in a predetermined processing band is suppressed in comparison with a component having a frequency which is lower than a frequency at the lower end of the processing band, and an arithmetic processing section which generates information regarding blood flow in the blood vessel from the signal after the filter processing.

    Optical Device And Spectroscopic Device
    7.
    发明公开

    公开(公告)号:US20240288362A1

    公开(公告)日:2024-08-29

    申请号:US18586650

    申请日:2024-02-26

    CPC classification number: G01N21/31 G02B26/0816 G01N2201/0636

    Abstract: An optical device includes: an incident optical system; an analysis optical system; and a length measurement optical system. The incident optical system includes a laser light source, and an incident light dividing element that divides the laser light. The analysis optical system includes a first light dividing element that divides the first divided light and then mixes the light, a first mirror that adds a first modulation signal to the one first divided light by movement and reflection, a second mirror, and a first light receiving element that receives the first divided light including a sample-derived signal and the first modulation signal. The length measurement optical system includes a second light dividing element that divides the second divided light and then mixes the light, an optical feedback unit that feeds back the one second divided light to the second light dividing element, and a second light receiving element that receives the second divided light including a displacement signal generated by the first mirror.

    Optical Modulator And Laser Interferometer
    8.
    发明公开

    公开(公告)号:US20240176157A1

    公开(公告)日:2024-05-30

    申请号:US18522741

    申请日:2023-11-29

    CPC classification number: G02B27/1086 G01B9/0201

    Abstract: An optical modulator includes: a vibrator configured to perform flexural vibration along a first direction; and a diffraction grating disposed in the vibrator and having a plurality of grooves arranged in parallel along the first direction. A frequency of laser light incident on the diffraction grating is shifted. In addition, it is preferable that the vibrator includes a base portion, a first vibration arm, and a second vibration arm disposed side by side along the first direction and coupled to the base portion, the first vibration arm and the second vibration arm perform the flexural vibration along the first direction, and the diffraction grating is disposed on at least one of the first vibration arm and the second vibration arm.

    Laser Interferometer
    9.
    发明公开

    公开(公告)号:US20230314121A1

    公开(公告)日:2023-10-05

    申请号:US18325729

    申请日:2023-05-30

    CPC classification number: G01B9/02002 G01B9/02083 G02B5/04

    Abstract: A laser interferometer includes alight source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.

    LASER INTERFEROMETER
    10.
    发明公开

    公开(公告)号:US20230280152A1

    公开(公告)日:2023-09-07

    申请号:US18173182

    申请日:2023-02-23

    CPC classification number: G01B9/02001 G01B9/0207

    Abstract: A laser interferometer includes: a laser light source configured to emit laser light; an optical modulator including a vibrator driven by a drive signal and configured to superimpose a modulation signal on the laser light using the vibrator; a photodetector configured to receive the laser light including a sample signal superimposed thereon due to reflection by an object and the laser light including the modulation signal, and output a light receiving signal; a calculation unit configured to perform a calculation on the light receiving signal based on a reference signal; and a signal generation unit configured to output the drive signal and the reference signal. The calculation unit includes a preprocessing unit configured to perform preprocessing for extracting a frequency modulation component from the light receiving signal based on the reference signal, and output a preprocessing signal including the frequency modulation component, a demodulation processing unit configured to demodulate the sample signal from the preprocessing signal based on the reference signal, and a correction processing unit configured to output a correction signal based on an output signal output in response to driving of the vibrator. The signal generation unit corrects the drive signal and the reference signal based on the correction signal.

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