公开(公告)号：US20250105032A1

公开(公告)日：2025-03-27

申请号：US18442548

申请日：2024-02-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung Hyun PARK ,  Min Suk KANG ,  Young-Hoo KIM ,  Jin Seon YOU ,  Tae-Hong KIM ,  Woo Gwan SHIM

IPC: H01L21/67

Abstract: A chemical liquid supply apparatus is provided and includes an additive supply, a chemical liquid supply, and a controller that controls the additive supply and the chemical liquid supply. The additive supply includes a first tank that receives an additive from an additive container, and a first circulating pipe connected to the first tank. The chemical liquid supply includes an auxiliary tank that receives an etching liquid from another container and receives the additive, and a second circulating pipe connected to the auxiliary tank. The controller provides control so as to: circulate the additive in the first tank; heat the etching liquid in the auxiliary tank using a heater such that a temperature of the etching liquid is increased to a first temperature; supply the additive to the auxiliary tank; and produce a chemical liquid by circulating the etching liquid and the additive at the first temperature.

公开(公告)号：US20250091077A1

公开(公告)日：2025-03-20

申请号：US18661139

申请日：2024-05-10

Applicant: SAMSUNG ELECTRONICS CO, LTD.

Inventor： Min Suk KANG ,  Young-Hoo KIM ,  Sung Hyun PARK ,  Jin Seon YOU ,  Tae-Hong KIM ,  Woo Gwan SHIM

IPC: B05B14/00 ,  B05B15/50

Abstract: A home port includes: a cylindrical body including: an open upper, a lower end, and an outlet in the lower end of the cylindrical body; a cover covering the open upper end; a pipe connected to the outlet; and a first bracket between the cover and the outlet, wherein a hole is provided in the first bracket, the first bracket has an inclined surface inclined from a first side of the first bracket to a second side of the first bracket, a vertical level of the first side of the first bracket is higher than a vertical level of the second side of the first bracket, and the hole of the first bracket is provided at the second side of the first bracket.