公开(公告)号：US20150049322A1

公开(公告)日：2015-02-19

申请号：US14320695

申请日：2014-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Hyuk PARK ,  Doo-Jin YUN ,  Chung-Jae LEE ,  In-Heui YUN ,  Chang-soo LEE

IPC: G03F7/20

CPC classification number: H01L21/67733 ,  G03F7/70991 ,  H01L21/67276

Abstract: A substrate processing system may include at least one transfer device which transfers a substrate between a plurality of substrate processors and includes a first controller which controls the transfer device and a first communication module connected to the first controller, and at least one maintenance device configured to perform maintenance for the substrate processors and includes a second controller which controls the maintenance device and a second communication module connected to the second controller. The first controller may obtain information about the maintenance device through the first and second communication modules to control the transfer device, and the second controller may obtain information about the transfer device through the first and second communication modules to control the maintenance device.

Abstract translation: 衬底处理系统可以包括至少一个传送装置，其在多个衬底处理器之间传送衬底，并且包括控制传送装置的第一控制器和连接到第一控制器的第一通信模块，以及至少一个维护装置， 执行基板处理器的维护，并且包括控制维护装置的第二控制器和连接到第二控制器的第二通信模块。 第一控制器可以通过第一和第二通信模块获得关于维护设备的信息以控制传送设备，并且第二控制器可以通过第一和第二通信模块获得关于传送设备的信息，以控制维护设备。