公开(公告)号：US20230047722A1

公开(公告)日：2023-02-16

申请号：US17580708

申请日：2022-01-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SANGMIN LEE ,  SEULGI LEE ,  SUNGWOOK JUNG ,  HYUKJUN KWON ,  HYANGROK LEE

IPC: G02B27/09 ,  G02B27/28 ,  G02B27/10 ,  G02B27/14 ,  G02B3/00 ,  B23K26/00 ,  B23K26/067 ,  B23K26/06

Abstract: A method of operating an apparatus for laser annealing, includes reducing temporal or spatial coherency of a plurality of laser beams by beam superimposing; and reducing an electric field inner product magnitude of beams having the reduced temporal or spatial coherency by a fly eye lens array to reduce coherency, and/or by modifying a polarization state between the beams by beam superimposing.