公开(公告)号：US20190217414A1

公开(公告)日：2019-07-18

申请号：US16249533

申请日：2019-01-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyongho HONG ,  Dokyun KWON ,  Seokjoo LEE ,  Jeongho YI

IPC: B23K26/142 ,  B08B5/04

CPC classification number: B23K26/142 ,  B08B5/04

Abstract: A laser apparatus including a stage. A target substrate is mounted on the stage. The laser apparatus further includes a coupling unit disposed below the stage and coupled with a conveying unit, the conveying unit conveying the stage. The laser apparatus additionally includes a discharge unit disposed at a predetermined position for laser machining, configured to communicate with the coupling unit when docked with the coupling unit, and configured to discharge foreign matter that is generated during laser machining.