公开(公告)号：US07059475B2

公开(公告)日：2006-06-13

申请号：US09971352

申请日：2001-10-04

申请人： Michael C. Zabka ,  Matthew Nicolas ,  David Molitor

发明人： Michael C. Zabka ,  Matthew Nicolas ,  David Molitor

IPC分类号： B65D85/30

CPC分类号： H01L21/67366 ,  H01L21/67369 ,  H01L21/67386

摘要： The invention relates to transport and shipping containers for wafers that are processed into semiconductor units. The wafer transport system provides wafer carriers that provide damage protection and particulate protection with minimal contamination of the wafers in the shipper. The invention includes a wafer cushion for cushioning semiconductor wafers that is made of a closed-cell polyethylene material with a surface resistivity of less than 5×107 ohms per square that has less than 1800 ng/g Cl−, 400 ng/g F−/Acetate, 270 ng/g NO3−, 350 ng/g SO42−, and 60 ng/g PO43−ions leachable under moderate conditions. The wafer cushion optimally has no detectable outgassing organics under stringent conditions. The static control properties are the result of carbon that is part of the structure of the material.

摘要翻译： 本发明涉及用于加工成半导体单元的晶片的运输和运输容器。 晶片输送系统提供晶片载体，其提供损伤保护和颗粒保护，同时托运人中晶片的污染最小。 本发明包括用于缓冲半导体晶片的晶片衬垫，其由表面电阻率小于每平方米5×10 7欧姆的闭孔聚乙烯材料制成，其具有小于1800ng / g的Cl