公开(公告)号：US20230403936A1

公开(公告)日：2023-12-14

申请号：US18155249

申请日：2023-01-17

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Young-Ho Cho ,  Mookyum Kim

IPC: H10N30/092 ,  G01L1/16 ,  H10N30/85 ,  H10N30/87 ,  H10N30/30 ,  H10N30/06

CPC classification number: H10N30/092 ,  G01L1/16 ,  H10N30/852 ,  H10N30/877 ,  H10N30/302 ,  H10N30/06

Abstract: Provided are a device for detecting low-pressure that includes electrodes positioned on a surface of a porous piezoelectric composite layer in which a piezoelectric nanoparticle and a pore are uniformly distributed, and a manufacturing method thereof.