NONVOLATILE MEMORY DEVICES AND METHODS OF FABRICATING THE SAME
    1.
    发明申请
    NONVOLATILE MEMORY DEVICES AND METHODS OF FABRICATING THE SAME 有权
    非易失性存储器件及其制造方法

    公开(公告)号:US20140038385A1

    公开(公告)日:2014-02-06

    申请号:US13946307

    申请日:2013-07-19

    IPC分类号: H01L21/762

    摘要: Nonvolatile memory devices and methods of fabricating the same, include, forming a transistor in a first region of a substrate, forming a contact which is connected to the transistor, forming an information storage portion, which is disposed two-dimensionally, in a second region of the substrate, sequentially forming a stop film and an interlayer insulating film which cover the contact and the information storage portion, forming a first trench, which exposes the stop film, on the contact, and forming a second trench which extends through the stop film to expose the contact, wherein a bottom surface of the first trench is lower than a bottom surface of the information storage portion.

    摘要翻译: 非易失性存储器件及其制造方法包括:在衬底的第一区域中形成晶体管,形成连接到晶体管的触点,形成二维地设置在第二区域中的信息存储部分 的基板,顺序地形成覆盖接触的信息存储部分的停止膜和层间绝缘膜,形成在接触件上露出停止膜的第一沟槽,并形成延伸穿过停止膜的第二沟槽 暴露触点,其中第一沟槽的底表面低于信息存储部分的底面。