公开(公告)号：US20230257314A1

公开(公告)日：2023-08-17

申请号：US17980287

申请日：2022-11-03

Applicant: KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY

Inventor： Sung min LEE ,  Yoon Suk OH ,  Hyeong Jun KIM ,  Gyusang OH

IPC: C04B41/52 ,  C04B35/10 ,  C04B41/50 ,  C04B41/45 ,  C04B41/00 ,  C04B41/87 ,  C23C4/11

CPC classification number: C04B41/522 ,  C04B35/10 ,  C04B41/5045 ,  C04B41/5055 ,  C04B41/4543 ,  C04B41/4558 ,  C04B41/0072 ,  C04B41/87 ,  C23C4/11 ,  C04B2235/3217 ,  C04B2235/9669

Abstract: The present invention provides a plasma-resistant ceramic member, which includes a substrate and a ceramic coating layer formed on the substrate, in which the ceramic coating layer includes a lower layer consisting of an oxide formed on the substrate, and a surface layer in which an oxide composition component constituting the surface of the ceramic coating layer is surface-modified with a composition containing one or more anions selected from the group consisting of F− and Cl−, wherein the surface layer is a layer in which a raw material containing one or more anions selected from the group consisting of F− and Cl− is vaporized by heating and adsorbed to the surface of the ceramic coating layer, and thus modified with a composition containing one or more anions selected from the group consisting of F− and Cl−, and a method of manufacturing the same. According to the present invention, the plasma-resistant property, durability, and etching process stability of the ceramic member may be improved with low costs.

公开(公告)号：US20240043338A1

公开(公告)日：2024-02-08

申请号：US18268879

申请日：2021-12-02

Applicant: KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY

Inventor： Sung Min LEE ,  Yoon Suk OH ,  Hyeong Jun KIM ,  Gyusang OH

IPC: C04B35/44 ,  C04B41/81 ,  C04B35/48

CPC classification number: C04B35/44 ,  C04B41/81 ,  C04B35/48 ,  C04B2235/963

Abstract: The present invention provides a plasma-resistant ceramic substrate including a bulk of an oxide composition; and a surface layer in which an oxide composition component constituting the bulk was modified to a composition including one or more anions selected from the group consisting of F− and Cl−, wherein the surface layer is a layer in which a raw material containing one or more anions selected from the group consisting of F− and Cl− is vaporized by heating and adsorbed on the surface of the ceramic substrate to be modified to a composition including one or more anions selected from the group consisting of F− and Cl−, and a method of manufacturing the same. According to the present invention, the plasma resistance and durability of the ceramic substrate can be improved at low cost.