公开(公告)号：US20030048244A1

公开(公告)日：2003-03-13

申请号：US10105281

申请日：2002-03-26

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Koeng Su Lim ,  Jun-Bo Yoon ,  Jin-Wan Jeon

IPC: G09G003/34

CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

Abstract: Disclosed are a micromirror device made in a simple structure using interdigitated cantilevers and having two stable rotational states, and applications thereof. The micromirror device comprises: (a) a substrate; (b) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other; (c) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated; (d) mirror support posts coupled to upper portions of the other ends of the cantilevers; (e) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and (f) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers. The micromirror device can drive the mirror in two directions and adjust a rotational angle of the mirror using the electrostatic force due to a potential difference between the electrodes and the mirror for reflecting incident light, and the elastic restoring force of the cantilevers.

Abstract translation: 公开了以简单结构制造的微反射镜装置，其使用交叉悬臂并具有两个稳定的旋转状态及其应用。 所述微镜器件包括：（a）衬底; （b）至少两个突出的支撑柱，其突出地设置在基板的左右两列中，彼此隔开预定的间隔; （c）与基板平行地形成的多个悬臂，每个悬臂与相应的突出的支柱的上端部连接，并且制成具有弹性恢复力的薄带，其中彼此相邻的悬臂布置成 平行和交叉; （d）耦合到悬臂的另一端的上部的镜支撑柱; （e）镜子，其安装在整个反射镜支撑柱的上部并由镜支撑柱支撑; 和（f）在基板上的左右两侧形成的两个电极，用于向反射镜提供静电力，其中微反射镜装置通过使用由于电压而产生的静电力使彼此不同方向的入射到反射镜中的光反射 施加在电极和反射镜之间，以及悬臂的弹性恢复力。 微镜装置可以在两个方向上驱动反射镜，并且由于电极和用于反射入射光的反射镜之间的电位差以及悬臂的弹性恢复力，使用静电力来调整反射镜的旋转角度。