公开(公告)号：US09423357B2

公开(公告)日：2016-08-23

申请号：US14288622

申请日：2014-05-28

Applicant: KLA-Tencor Corporation

Inventor： Shiyu Zhang ,  Charles N. Wang ,  Yevgeniy Churin ,  Yong-Mo Moon ,  Hyoseok Daniel Yang ,  Mark S. Wang

IPC: F21V7/09 ,  G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501

Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种倾斜照明器。 倾斜照明器包括发射光束的光源，第一反射表面和第二反射表面。 第一反射表面具有凸起的圆柱形形状，具有沿着非供电方向的投影抛物线轮廓，其被配置为反射来自光源的光束并且限定焦线。 第二反射表面具有凹入的圆柱形形状，其具有突出的椭圆形轮廓，其被配置为反射来自第一反射表面的光束并且限定第一和第二焦线。 第一反射面的焦线与第二反射面的第一焦线重合。 第二反射表面的第一和第二焦线可以是相同的线，在这种情况下，椭圆曲率是投影的球形轮廓。 还公开了其它实施例，方面和特征。