公开(公告)号：US09851300B1

公开(公告)日：2017-12-26

申请号：US14678411

申请日：2015-04-03

Applicant: KLA-Tencor Corporation

Inventor： Barak Bringoltz ,  Ofer Zaharan ,  Amnon Manassen ,  Nadav Carmel ,  Victoria Naipak ,  Alexander Svizher ,  Tzahi Grunzweig ,  Daniel Kandel

IPC: G01N21/55

CPC classification number: G03F7/70633

Abstract: Methods and metrology modules and tools are provided, which minimize an estimated overlay variation measure at misalignment vector values obtained from a derived functional form of an overlay linear response to non-periodic effects. Provided methods further quantifying target noise due to the non-periodic effects using multiple repeated overlay measurements of the target cells, calculating an ensemble of overlay measurements between the cells over the multiple measurement repeats and expressing the target noise as a statistical derivative of the calculated overlay measurements. Sub-ensembles may be selected to further characterize the target noise. Various outputs include optimized scanning patterns, target noise metrics and recipe and target optimization.