公开(公告)号：US20160104600A1

公开(公告)日：2016-04-14

申请号：US14880187

申请日：2015-10-09

Applicant: KLA-Tencor Corporation

Inventor： Qing Luo ,  Kenong Wu ,  Hucheng Lee ,  Lisheng Gao ,  Eugene Shifrin ,  Yan Xiong ,  Shuo Sun

IPC: H01J37/28

CPC classification number: G05B19/401 ,  G05B2219/37365 ,  G05B2219/37571 ,  H01J2237/221 ,  H01J2237/2817 ,  H01L22/12 ,  H01L22/20

Abstract: Systems and methods for detecting defects on a specimen based on structural information are provided. One system includes one or more computer subsystems configured for separating the output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on characteristic(s) of structure(s) in the array area such that the output in different segments has been generated in different locations in the array area in which the structure(s) having different values of the characteristic(s) are formed. The computer subsystem(s) are also configured for detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment.

Abstract translation: 提供了基于结构信息检测样本上的缺陷的系统和方法。 一个系统包括一个或多个计算机子系统，其被配置为基于检测子系统的检测器产生的输出，以将样本上的阵列区域中的输出的至少第一和第二段基于 阵列区域使得不同段中的输出已经在其中形成具有不同特征值的结构的阵列区域中的不同位置中生成。 计算机子系统还被配置为基于输出是在第一段还是第二段中，通过向输出应用一个或多个缺陷检测方法来检测样本上的缺陷。

公开(公告)号：US09727047B2

公开(公告)日：2017-08-08

申请号：US14880187

申请日：2015-10-09

Applicant: KLA-Tencor Corporation

Inventor： Qing Luo ,  Kenong Wu ,  Hucheng Lee ,  Lisheng Gao ,  Eugene Shifrin ,  Yan Xiong ,  Shuo Sun

IPC: G05B19/401 ,  H01L21/66

CPC classification number: G05B19/401 ,  G05B2219/37365 ,  G05B2219/37571 ,  H01J2237/221 ,  H01J2237/2817 ,  H01L22/12 ,  H01L22/20

Abstract: Systems and methods for detecting defects on a specimen based on structural information are provided. One system includes one or more computer subsystems configured for separating the output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on characteristic(s) of structure(s) in the array area such that the output in different segments has been generated in different locations in the array area in which the structure(s) having different values of the characteristic(s) are formed. The computer subsystem(s) are also configured for detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment.