公开(公告)号：US20180299324A1

公开(公告)日：2018-10-18

申请号：US15649388

申请日：2017-07-13

Applicant: KLA-Tencor Corporation

Inventor： Jeremy Nesbitt ,  Jagadeesh Kumar ,  David C. Oram

IPC: G01J3/02 ,  G01J3/18

Abstract: A system which may be used to which may be used to increase the number of available spectrum bands in an inspection system is provided. The system may include an illumination source configured to emit broadband illumination. The system may also include a filter assembly including two or more filter units. The two or more filter units may include two or more filters with one or more varying filtering characteristics. The system may also include two or more motors configured to selectively actuate selected filters of the filter units into the beam of illumination. Using the system, the number of available spectrum bands to be used in an inspection system may be increased.