公开(公告)号：US20140098363A1

公开(公告)日：2014-04-10

申请号：US13646246

申请日：2012-10-05

Applicant: KLA-Tencor Corporation

Inventor： Daniel Hey

IPC: G01J1/42

CPC classification number: G01J1/4257 ,  G01J1/0437 ,  G01J1/0444

Abstract: The disclosure is directed to a system and method for determining at least one characteristic of an illumination beam emanating from an illumination source. A substrate having a plurality of apertures may be actuated through an illumination beam so that apertures at different spatial offsets are scanned through the illumination beam at one or more levels of focus. Portions of illumination directed through scanned apertures may be received by at least one detector. At least one characteristic of the illumination beam may be extracted from data points associated with intensity levels associated with detected portions of illumination. Furthermore, multiple determinations of a beam characteristic made over a period of time may be utilized to calibrate the illumination source.

Abstract translation: 本公开涉及一种用于确定从照明源发出的照明光束的至少一个特性的系统和方法。 具有多个孔的基底可以通过照明光束被致动，使得在不同的空间偏移下的孔以一个或多个焦点水平被扫过照射束。 通过扫描的孔径引导的照明部分可以由至少一个检测器接收。 可以从与检测到的照明部分相关联的强度水平相关联的数据点提取照明光束的至少一个特性。 此外，可以利用在一段时间内进行的光束特性的多次确定来校准照明源。

公开(公告)号：US09116044B2

公开(公告)日：2015-08-25

申请号：US13646246

申请日：2012-10-05

Applicant: KLA-Tencor Corporation

Inventor： Daniel Hey

IPC: G01J1/00 ,  G01J1/42 ,  G01J1/04

CPC classification number: G01J1/4257 ,  G01J1/0437 ,  G01J1/0444

Abstract: The disclosure is directed to a system and method for determining at least one characteristic of an illumination beam emanating from an illumination source. A substrate having a plurality of apertures may be actuated through an illumination beam so that apertures at different spatial offsets are scanned through the illumination beam at one or more levels of focus. Portions of illumination directed through scanned apertures may be received by at least one detector. At least one characteristic of the illumination beam may be extracted from data points associated with intensity levels associated with detected portions of illumination. Furthermore, multiple determinations of a beam characteristic made over a period of time may be utilized to calibrate the illumination source.

Abstract translation: 本公开涉及一种用于确定从照明源发出的照明光束的至少一个特性的系统和方法。 具有多个孔的基底可以通过照明光束被致动，使得在不同的空间偏移下的孔以一个或多个焦点水平被扫过照射束。 通过扫描的孔径引导的照明部分可以由至少一个检测器接收。 可以从与检测到的照明部分相关联的强度水平相关联的数据点提取照明光束的至少一个特性。 此外，可以利用在一段时间内进行的光束特性的多次确定来校准照明源。