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公开(公告)号：US20200243306A1
公开(公告)日：2020-07-30
申请号：US16750317
申请日：2020-01-23
Applicant: KCTECH CO.,LTD.
Inventor： Yong Ki HAN
Abstract: Disclosed are an opening and shutting device and a substrate processing apparatus including the same. A device for opening and closing an entrance through which a substrate is carried into and out of a processing chamber includes an opening and shutting part that is disposed between the entrance and the processing chamber and that opens and closes the entrance while rotating so as to be brought into close contact with the entrance.
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