公开(公告)号：US10138395B2

公开(公告)日：2018-11-27

申请号：US15372701

申请日：2016-12-08

Applicant: K.C. Tech Co., Ltd.

Inventor： Jang Kuk Kwon ,  Sung Pyo Lee ,  Chang Gil Kwon ,  Jun Ha Hwang

IPC: C09G1/02 ,  C09K3/14 ,  H01L21/306 ,  H01L21/3105 ,  H01L21/321

Abstract: An abrasive particle-dispersion layer composite and a polishing slurry composition including the abrasive particle-dispersion layer composite are provided. The abrasive particle-dispersion layer composite includes abrasive particles, a first dispersant that is at least one anionic compound among a copolymer with a functional group of a resonance structure, a carboxyl group-containing polymer and a carboxyl group-containing organic acid, a second dispersant that is at least one cationic compound among an amino acid, an organic acid, polyalkylene glycol and a high-molecular polysaccharide coupled to a glucosamine compound, and a third dispersant that is a cationic polymer including at least two ionized cations in a molecular formula.

公开(公告)号：US20170166780A1

公开(公告)日：2017-06-15

申请号：US15372701

申请日：2016-12-08

Applicant: K.C. Tech Co., Ltd.

Inventor： Jang Kuk KWON ,  Sung Pyo Lee ,  Chang Gil Kwon ,  Jun Ha Hwang

IPC: C09G1/02 ,  H01L21/3105 ,  H01L21/306 ,  C09K3/14

CPC classification number: C09G1/02 ,  C09K3/1409 ,  C09K3/1436 ,  C09K3/1463 ,  H01L21/30625 ,  H01L21/31053 ,  H01L21/31055 ,  H01L21/3212

Abstract: An abrasive particle-dispersion layer composite and a polishing slurry composition including the abrasive particle-dispersion layer composite are provided. The abrasive particle-dispersion layer composite includes abrasive particles, a first dispersant that is at least one anionic compound among a copolymer with a functional group of a resonance structure, a carboxyl group-containing polymer and a carboxyl group-containing organic acid, a second dispersant that is at least one cationic compound among an amino acid, an organic acid, polyalkylene glycol and a high-molecular polysaccharide coupled to a glucosamine compound, and a third dispersant that is a cationic polymer including at least two ionized cations in a molecular formula.