公开(公告)号：US20230079523A1

公开(公告)日：2023-03-16

申请号：US17798228

申请日：2021-01-14

Applicant: Hitachi High-Tech Corporation

Inventor： Takanori AONO ,  Yoshisada EBATA ,  Kenta YAEGASHI ,  Shigeru MATSUI ,  Isao UCHIDA ,  Jiro YAMAMOTO

IPC: G02B5/18

Abstract: The present invention provides a concave diffraction grating and an optical device using the concave diffraction grating, the concave diffraction grating being capable of preventing deformation of a reflection film due to the influence of temperature, and preventing deterioration in optical characteristic due to temperature. This concave diffraction grating is provided with: a reflection film (22) having a plurality of grating grooves (21); a holding film (25) comprising metal and having one surface on which the reflection film (22) is provided; a concave substrate (24) having a concave surface (24a); and an affixing layer (23) provided between the concave surface (24a) and the other surface of the holding film (25), and affixing the holding film (25) and the reflection film (22) to the concave substrate (24).

公开(公告)号：US20210271008A1

公开(公告)日：2021-09-02

申请号：US17258818

申请日：2019-04-24

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Takanori AONO ,  Yoshisada EBATA ,  Kenta YAEGASHI ,  Shigeru MATSUI

IPC: G02B5/18 ,  G02B27/00 ,  G01J3/18

Abstract: The present invention provides a concave diffraction grating capable of improved diffraction efficiency by suppressing spherical aberration. The concave diffraction grating is a concave diffraction grating 2 for dispersing and focusing light and comprises sawtooth grating grooves 21 on a concave substrate 24, with the sawtooth grating grooves 21 being unequally spaced. The concave diffraction grating 2 for dispersing and focusing light is formed by preparing a planar diffraction grating with a sawtooth shape which is formed on a planar substrate by photo-lithography and etching or machining and which forms unequally spaced grating grooves 21, deforming and mounting the planar diffraction grating along a fixed convex substrate to obtain a mold of a concave diffraction grating, and transferring the mold of the concave diffraction grating to the surface of a metal or a resin.

公开(公告)号：US20230236345A1

公开(公告)日：2023-07-27

申请号：US18008628

申请日：2021-02-25

Applicant: Hitachi High-Tech Corporation

Inventor： Takanori AONO ,  Yoshisada EBATA ,  Kenta YAEGASHI ,  Shigeru MATSUI

IPC: G02B5/18

CPC classification number: G02B5/1857

Abstract: Provided is a feature for highly precisely manufacturing a concave diffraction grating that has a uniform diffraction grating pattern. This method for manufacturing a concave diffraction grating includes: preparing a flat diffraction grating that has a lattice groove and that also has an elongated section, a thin-film section, or a low-friction section formed outside of a region for forming a mold for the concave diffraction grating; mounting the flat diffraction grating on a convex substrate and acquiring the mold for the concave diffraction grating; and transferring the lattice groove in the mold to the concave substrate.