Micro-speaker, speaker device and electronic apparatus

    公开(公告)号:US11128957B2

    公开(公告)日:2021-09-21

    申请号:US15769798

    申请日:2015-10-21

    Applicant: Goertek Inc.

    Abstract: A micro-speaker, the manufacturing method thereof, a speaker device and an electronic apparatus are described herein. The micro-speaker comprises a case, wherein the case has an opening; and a piezoelectric layer, wherein one or more electrodes are provided on the piezoelectric layer, and wherein the piezoelectric layer is pre-buckled in its rest position, wherein the piezoelectric layer covers the opening and is bonded onto the case, to form a speaker rear cavity together with the case. The micro-speaker of the present invention has a relatively low speaker profile.

    MEMS microphone
    3.
    发明授权

    公开(公告)号:US11974094B2

    公开(公告)日:2024-04-30

    申请号:US16475506

    申请日:2017-03-03

    Applicant: Goertek, Inc.

    CPC classification number: H04R19/04 H04R7/04 H04R19/005 H04R2201/003

    Abstract: A MEMS microphone is provided, comprising a substrate having a back cavity, and a plate capacitor structure arranged on the substrate, the plate capacitor structure being formed by a vibration diaphragm, a backplate and a support portion; wherein a pressure relief device is provided in the vibration diaphragm, a pressure maintaining channel is formed between the vibration diaphragm and the backplate; and the pressure relief device in the vibration diaphragm constitutes an inlet of the pressure maintaining channel.

    MEMS Microphone
    4.
    发明公开
    MEMS Microphone 审中-公开

    公开(公告)号:US20230199406A1

    公开(公告)日:2023-06-22

    申请号:US16475506

    申请日:2017-03-03

    Applicant: Goertek, Inc.

    CPC classification number: H04R19/04 H04R7/04 H04R19/005 H04R2201/003

    Abstract: A MEMS microphone is provided, comprising a substrate having a back cavity, and a plate capacitor structure arranged on the substrate, the plate capacitor structure being formed by a vibration diaphragm, a backplate and a support portion; wherein a pressure relief device is provided in the vibration diaphragm, a pressure maintaining channel is formed between the vibration diaphragm and the backplate; and the pressure relief device in the vibration diaphragm constitutes an inlet of the pressure maintaining channel.

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