公开(公告)号：US11081853B2

公开(公告)日：2021-08-03

申请号：US16865537

申请日：2020-05-04

Applicant: Gigaphoton Inc.

Inventor： Yoshinobu Watabe ,  Masahide Kato ,  Hiroshi Furusato

IPC: H01S3/106 ,  G03F7/20 ,  G02B7/02 ,  G02B27/09 ,  H01S3/038

Abstract: An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.