公开(公告)号：US20160370706A1

公开(公告)日：2016-12-22

申请号：US15256762

申请日：2016-09-06

Applicant: GIGAPHOTON INC.

Inventor： Naoyoshi IMACHI ,  Osamu WAKABAYASHI

IPC: G03F7/20

CPC classification number: G03F7/70033 ,  H05G2/006 ,  H05G2/008

Abstract: An extreme ultraviolet light generation apparatus may include: a target supply device configured to supply targets from a nozzle; a first illumination device configured to output light having a first characteristic to illuminate targets outputted from the nozzle; a second illumination device configured to output light having a second characteristic different from the first characteristic to illuminate the targets outputted from the nozzle; a first imaging device configured to photograph light reflected off the targets illuminated with the light having the first characteristic; and a second imaging device configured to photograph light reflected off the targets illuminated with the light having the second characteristic.

Abstract translation: 远紫外线发生装置可以包括：目标供给装置，其构造成从喷嘴供给目标物; 第一照明装置，被配置为输出具有第一特性的光，以照亮从喷嘴输出的目标; 第二照明装置，被配置为输出具有与所述第一特性不同的第二特性的光，以照射从所述喷嘴输出的目标; 第一成像装置，被配置为拍摄由具有第一特征的光照射的目标反射的光; 以及第二成像装置，被配置为拍摄由具有第二特征的光照射的目标反射的光。

公开(公告)号：US20140253716A1

公开(公告)日：2014-09-11

申请号：US14201327

申请日：2014-03-07

Applicant: GIGAPHOTON INC.

Inventor： Takashi SAITO ,  Naoyoshi IMACHI ,  Osamu WAKABAYASHI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: A chamber for an extreme ultraviolet light generation apparatus is a chamber into which droplets are sequentially outputted, and may include an image capturing unit configured to repeatedly capture images of the droplets during an image capturing time set so that images of two adjacent droplets that have been outputted do not overlap.

Abstract translation: 用于极紫外光发生装置的室是依次输出液滴的室，并且可以包括图像捕获单元，其被配置为在设置的图像捕获时间期间反复捕获液滴的图像，使得已经存在两个相邻液滴的图像 输出不重叠。