公开(公告)号：US20170160072A1

公开(公告)日：2017-06-08

申请号：US15236724

申请日：2016-08-15

Applicant: Finite Element Analyst, Inc.

Inventor： Eyad Ammari

IPC: G01B9/02 ,  G01J3/453

CPC classification number: G01B9/02043 ,  G01J3/4535 ,  G01J3/4537 ,  G01N2021/3595

Abstract: This disclosure provides an optical interferometer including a multi-faceted optical element that is rotated to introduce an optical path length difference between two different optical paths in the interferometer. The multi-faceted optical element can be configured to be rotated about an axis such that the optical path length difference between the first and second optical paths varies between a first value and a second value several times during one complete rotation of the optical element. The multi-faceted optical element can be rotationally symmetric having n-fold rotational symmetry. The two different optical paths can be non-coplanar with respect to each other and the multi-faceted optical element can be disposed in one of the optical paths or both the optical paths.

公开(公告)号：US20150292859A1

公开(公告)日：2015-10-15

申请号：US14252564

申请日：2014-04-14

Applicant: Finite Element Analyst, Inc.

Inventor： Eyad Ammari

IPC: G01B9/02 ,  G01J3/453

CPC classification number: G01B9/02043 ,  G01J3/4535 ,  G01J3/4537 ,  G01N2021/3595

Abstract: This disclosure provides an optical interferometer including a multi-faceted optical element that is rotated to introduce an optical path length difference between two different optical paths in the interferometer. The multi-faceted optical element can be configured to be rotated about an axis such that the optical path length difference between the first and second optical paths varies between a first value and a second value several times during one complete rotation of the optical element. The multi-faceted optical element can be rotationally symmetric having n-fold rotational symmetry. The two different optical paths can be non-coplanar with respect to each other and the multi-faceted optical element can be disposed in one of the optical paths or both the optical paths.

Abstract translation: 本公开提供了一种包括多面光学元件的光学干涉仪，其被旋转以在干涉仪中的两个不同光路之间引入光程差。 多面光学元件可以被配置为围绕轴旋转，使得在光学元件的一次完整旋转期间，第一和第二光路之间的光程长度差在第一值和第二值之间变化多次。 多面光学元件可旋转对称具有n倍旋转对称性。 两个不同的光路可以相对于彼此是非共面的，并且多面光学元件可以设置在光路中的一个或两个光路中。