公开(公告)号：US20210407762A1

公开(公告)日：2021-12-30

申请号：US17354986

申请日：2021-06-22

Applicant: FEI Company

Inventor： Peter TIEMEIJER ,  Evgeniia PECHNIKOVA ,  Rudolf GEURINK ,  Abhay KOTECHA ,  Jamie MCCORMACK

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/05 ,  H01J37/26

Abstract: The disclosure relates to a method of imaging a specimen using a transmission charged particle microscope, said method comprising providing a specimen, and providing a charged particle beam and directing said charged particle beam onto said specimen for generating a flux of charged particles transmitted through the specimen. The method comprises the step of generating and recording a first energy filtered flux of charged particles transmitted through the specimen, wherein said first energy filtered flux of charged particles substantially consists of non-scattered and elastically scattered charged particles. The method as disclosed herein comprises the further step of generating and recording a second energy filtered flux of charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles. Said first and second recorded energy filtered flux are then used for imaging said specimen with increased contrast.