公开(公告)号：US09315897B2

公开(公告)日：2016-04-19

申请号：US13375434

申请日：2010-05-13

申请人： Chulsoo Byun ,  Man Cheol Han ,  Il Yong Chung ,  Seok Woo Lee

发明人： Chulsoo Byun ,  Man Cheol Han ,  Il Yong Chung ,  Seok Woo Lee

IPC分类号： C23C16/455

CPC分类号： C23C16/45565 ,  C23C16/45563 ,  C23C16/45572 ,  C23C16/45574 ,  C23C16/45576 ,  C23C16/45591

摘要： A showerhead for film-depositing vacuum equipment having an effect shortening the length of injection tubes for a reactive gas is presented. The injection tubes extend from the bottom of a reactive gas showerhead module, and two different kinds of reactive gases are mixed with an injection support gas within a reactive showerhead module so as to inject the mixed gas. The showerhead for film-depositing vacuum equipment includes the reactive gas showerhead module above a cooling jacket and a purge gas showerhead module above the reactive gas showerhead module. The injection tubes of the reactive gas showerhead module pass through the cooling jacket disposed below the reactive gas showerhead module, and the injection tubes of the purge gas showerhead module pass through the reactive gas showerhead module disposed below the purge gas showerhead module, thereby enabling the purge gas to flow into a purge gas redistribution space defined above the cooling jacket.

摘要翻译： 提出了一种用于成膜真空设备的喷头，其具有缩短反应气体的注射管的长度的效果。 注射管从反应性气体喷头模块的底部延伸，并且两种不同种类的反应气体与反应性喷头模块内的注射支撑气体混合，以便注入混合气体。 用于成膜真空设备的喷头包括在冷却套上方的反应性气体喷头模块和在反应性气体喷头模块上方的吹扫气喷头模块。 反应性气体喷头模块的注射管通过设置在反应性气体喷头模块下方的冷却套管，并且吹扫气体喷头模块的注射管通过布置在吹扫气喷头模块下方的反应性气体喷头模块， 吹扫气体流入冷却套管上方定义的净化气体再分布空间。

公开(公告)号：US07488057B2

公开(公告)日：2009-02-10

申请号：US10561332

申请日：2004-05-11

申请人： Young June Cho ,  Chul Soo Byun ,  Moon Soo Park ,  Kyung Tae Kang ,  Young Seok Choi ,  Il Yong Chung ,  Jaichan Lee

发明人： Young June Cho ,  Chul Soo Byun ,  Moon Soo Park ,  Kyung Tae Kang ,  Young Seok Choi ,  Il Yong Chung ,  Jaichan Lee

IPC分类号： B41J2/045 ,  H01L41/22

CPC分类号： B41J2/1626 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14362 ,  B41J2202/03 ,  Y10T29/42

摘要： Disclosed is a piezoelectric ink jet printer head in which a chamber and an ink storage are integrally formed. A process for manufacturing the ink jet printer head is also disclosed. The ink jet printer head formed by laminating a plurality of plates includes: a) an actuator portion being composed of upper and lower electrodes, a piezoelectric plate inserted between the upper and lower electrodes, a protection layer placed on the upper electrode, and a resilient plate disposed beneath the lower electrode; b) an ink passage portion composed of a spacer disposed beneath the resilient plate and forming a side portion of a chamber, a channel plate disposed beneath the spacer, the channel plate forming an ink passage in one side of the chamber and simultaneously expanding the chamber, and a nozzle plate disposed beneath the channel plate, the nozzle plate forming the lower side of the chamber and having a nozzle communicating with the chamber; and c) an ink-supplying portion formed by a through-hole reaching the ink passage of the channel plate through the actuator portion and the spacer.

摘要翻译： 公开了一种压电喷墨打印机头，其中腔室和墨水储存器一体形成。 还公开了一种用于制造喷墨打印机头的方法。 通过层叠多个板形成的喷墨打印头包括：a）由上下电极构成的致动器部分，插入在上电极和下电极之间的压电板，设置在上电极上的保护层，以及弹性 设置在下电极下方的板; b）墨水通道部分，其由设置在弹性板下方并形成腔室的侧部的间隔件，设置在间隔件下方的通道板组成，通道板在腔室的一侧形成墨水通道，同时使腔室 以及设置在所述通道板下方的喷嘴板，所述喷嘴板形成所述室的下侧，并且具有与所述室连通的喷嘴; 以及c）由通过所述致动器部分和所述间隔件到达所述通道板的油墨通道的通孔形成的供墨部分。