公开(公告)号：US20240102860A1

公开(公告)日：2024-03-28

申请号：US18460721

申请日：2023-09-05

Applicant: CHROMA ATE INC.

Inventor： Cheng Chih HSIEH ,  Tien Chi WU ,  Ming-Long LEE ,  Yu-Hsuan LIN ,  Tsung-I LIN ,  Chien-Hao MA

IPC: G01J3/16

CPC classification number: G01J3/16

Abstract: An apparatus includes a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller. The six-axis correction stage carries a device under test; the auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis; the light splitter is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device. A method controls the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of the telecentric image measurement device by means of the controller.