公开(公告)号：US20180269089A1

公开(公告)日：2018-09-20

申请号：US15461952

申请日：2017-03-17

Applicant: Applied Materials, Inc.

Inventor： Niraj MERCHANT ,  Lara HAWRYLCHAK ,  Mehran BEHDJAT ,  Dietrich GAGE ,  Christopher DAO ,  Binh NGUYEN ,  Michael P. KAMP ,  Mahesh RAMAKRISHNA

IPC: H01L21/67 ,  G01J5/34 ,  G01J5/00 ,  G01R35/00 ,  H05B1/02 ,  H05B3/00 ,  H01L21/66

Abstract: Embodiments of the disclosure relate to methods for measuring temperature and a tool for calibrating temperature control of a substrate support in a processing chamber without contact with a surface of the substrate support. In one embodiment, a test fixture with a temperature sensor is removably mounted to an upper surface of a chamber body of the processing chamber such that the temperature sensor has a field of view including an area of the substrate support that is adjacent to a resistive coil disposed in the substrate support. One or more calibration temperature measurements of the area of the substrate support are taken by the temperature sensor and simultaneously one or more calibration resistance measurements of the resistive coil are taken corresponding to each calibration temperature measurement. Temperature control of a heating element disposed in the substrate support is calibrated based on the calibration temperature and calibration resistance measurements.

公开(公告)号：US20170294325A1

公开(公告)日：2017-10-12

申请号：US15417865

申请日：2017-01-27

Applicant: Applied Materials, Inc.

Inventor： Aaron Muir HUNTER ,  Mehran BEHDJAT ,  Niraj MERCHANT ,  Douglas R. MCALLISTER ,  Dongming IU ,  Kong Lung CHAN ,  Lara HAWRYLCHAK

IPC: H01L21/67

Abstract: A semiconductor processing apparatus is described that has a body with a wall defining two processing chambers within the body; a passage through the wall forming a fluid coupling between the two processing chambers; a lid removably coupled to the body, the lid having a portal in fluid communication with the passage; a gas activator coupled to the lid outside the processing chambers, the gas activator having an outlet in fluid communication with the portal of the lid; a substrate support disposed in each processing chamber, each substrate support having at least two heating zones, each with an embedded heating element; a gas distributor coupled to the lid facing each substrate support; and a thermal control member coupled to the lid at an edge of each gas distributor.