公开(公告)号：US20040241889A1

公开(公告)日：2004-12-02

申请号：US10751238

申请日：2003-12-30

Applicant: AU Optronics Corp.

Inventor： Long-Sheng Liao ,  Chien-Chou Hsu ,  Yi-Chang Tsao

IPC: H01L021/66

CPC classification number: H01L21/02667 ,  H01L21/2026

Abstract: A method and system of automatic beam energy control. First, a substrate is provided. Next, hydrogen content of the substrate is measured to determine whether hydrogen content exceeds a critical hydrogen content limit. A warning is issued when hydrogen content exceeds a critical hydrogen content limit. Substrate thickness is measured when hydrogen content does not exceed a critical hydrogen content limit. A database comprising a plurality of beam energy values individually absorbed by substrates of different thicknesses is provided. An appropriate beam energy level corresponding to the measured thickness is provided by the database. Finally, beam energy is delivered to the substrate accordingly.

Abstract translation: 自动光束能量控制的方法和系统。 首先，提供基板。 接下来，测量衬底的氢含量以确定氢含量是否超过临界氢含量极限。 当氢含量超过临界氢含量限制时，会发出警告。 当氢含量不超过临界氢含量极限时，测量基板厚度。 提供了包括由不同厚度的基板单独吸收的多个光束能量值的数据库。 由数据库提供与测量厚度对应的适当的光束能级。 最后，光束能量被相应地传送到衬底。