公开(公告)号：US20220260633A1

公开(公告)日：2022-08-18

申请号：US17733805

申请日：2022-04-29

Applicant: Advantest Corporation

Inventor： Shoji KOJIMA

IPC: G01R31/319

Abstract: Embodiments of the present invention provide systems and methods for storing calibration data for a test system operable to test a device under test (DUT). The test system includes one or more channel modules and a device interface. A first part of the calibration data is stored on a non-volatile memory. The non-volatile memory can be disposed in different parts of the test system. The non-volatile memory is located on the device interface and can also be located on one or more of the channel modules, as well as an attachment of the test system. The non-volatile memory is associated with the one or more channel modules. The second part of the calibration data is stored on a non-volatile memory associated with the device-under-test interface.

公开(公告)号：US20170090298A1

公开(公告)日：2017-03-30

申请号：US15221600

申请日：2016-07-28

Applicant: ADVANTEST CORPORATION

Inventor： Shoji KOJIMA ,  Akio YAMADA ,  Masahiro SEYAMA

IPC: G03F7/20

CPC classification number: G03F7/7055 ,  G03F7/2059 ,  H01J37/045 ,  H01J37/3177 ,  H01J2237/304

Abstract: Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.