Apparatus for conveying semiconductor substrates
    1.
    发明授权
    Apparatus for conveying semiconductor substrates 失效
    用于输送半导体衬底的装置

    公开(公告)号:US4483434A

    公开(公告)日:1984-11-20

    申请号:US374773

    申请日:1982-05-04

    CPC classification number: G03F7/70691 B65G47/244 H01L21/67796 B65G2203/042

    Abstract: An alignment apparatus for positioning a substrate in a determined position comprises three rotating rollers having outer circumferences contactable with the circumference of the substrate at three different portions thereof. A first roller and at least one of the remaining rollers are driven to rotate the substrate in a predetermined direction. A holder holds the first roller and is displaceably biased toward the remaining rollers. A rotation inhibitor comes into close contact with a flat on the substrate when the substrate comes to a predetermined rotated position in which the flat and the first roller are in opposition to each other. The rotation inhibitor is provided integrally with the holder in such a predetermined positional relation to the first roller that as a result of the close contact with the flat of the substrate, the inhibitor can inhibit the holder from being moved in the direction for contact between the first roller and the flat.

    Abstract translation: 用于将基板定位在确定位置的对准装置包括三个旋转辊,其具有可在其三个不同部分处与基板的周边接触的外周。 第一辊和至少一个剩余的辊被驱动以使基板沿预定方向旋转。 保持器保持第一辊并且朝向剩余的辊可移位地偏置。 当基板进入预定的旋转位置时,旋转抑制剂与基板上的平面紧密接触,其中平面和第一辊彼此相对。 旋转抑制器与保持器一体地设置成与第一辊的预定位置关系,由于与基板的平面紧密接触,抑制剂可以阻止保持器沿着与第一辊之间的接触方向移动 第一辊和平板。

    Spectrophotometer receiving a variable quantity of light
    2.
    发明授权
    Spectrophotometer receiving a variable quantity of light 失效
    分光光度计接收可变光量

    公开(公告)号:US4330209A

    公开(公告)日:1982-05-18

    申请号:US69924

    申请日:1979-08-27

    CPC classification number: G01J3/2803

    Abstract: This specification discloses a spectrophotometer utilizing, as the photoelectrical converting element, an image sensor capable of electrical scanning such as a photo-diode array, thus adjusting the integration time thereof, namely, the scanning time of the image sensor and enhancing the S/N (signal-to-noise ratio).

    Abstract translation: 本说明书公开了一种使用光电转换元件作为光电二极管阵列等能够进行电扫描的图像传感器的分光光度计,由此调整其积分时间,即图像传感器的扫描时间,提高S / N (信噪比)。

    System for driving a movable stage
    3.
    发明授权
    System for driving a movable stage 失效
    驱动可动台的系统

    公开(公告)号:US4577141A

    公开(公告)日:1986-03-18

    申请号:US675323

    申请日:1984-11-27

    CPC classification number: G05B19/253 G05B2219/35438 G05B2219/41156

    Abstract: In order to appropriately position a specimen within a view finder of a microscope, the stage supporting the specimen must be quickly and smoothly moved in all directions of two dimensions X and Y. According to the present invention, this can be accomplished by dividing a tilt angle of an operation lever of a joy stick into three regions, an insensitive band, a low velocity region and a high velocity region. For each of latter two regions, a relevant signal is produced by the joy stick and transferred to a microcomputer which controls stage driving motors by sawtooth pulse voltages. The velocities of X- and Y-stages are generally setted in the microcomputer so as to be high for the high speed region and low for the low speed regions, and movements in X- and Y-directions alternate by a short time interval, thus quick and smooth movements of stages being enabled.

    Abstract translation: 为了将样本适当地放置在显微镜的取景器内,支撑样本的台阶必须在二维X和Y的所有方向上快速平稳地移动。根据本发明,这可以通过将倾斜 操纵杆的操作杆的角度分为三个区域,不灵敏带,低速区域和高速区域。 对于后两个区域中的每一个,由操纵杆产生相关信号并传送到通过锯齿波脉冲电压控制级驱动电机的微型计算机。 X和Y级的速度通常设置在微型计算机中,对于高速区域为高,对于低速区域为低,并且X方向和Y方向的移动以短时间间隔交替,因此 启动阶段的快速平稳运动。

    Driving device for a revolver in a microscope
    4.
    发明授权
    Driving device for a revolver in a microscope 失效
    用显微镜驱动左轮手枪的装置

    公开(公告)号:US4486078A

    公开(公告)日:1984-12-04

    申请号:US484415

    申请日:1983-04-12

    CPC classification number: G02B7/16

    Abstract: A microscope provided with a revolver having objective lenses mounted thereon and rotatable to move the objective lenses into an observation optical path comprises means for varying the load torque for rotation of the revolver at the rotated position of the revolver when the objective lenses face a predetermined position in the observation optical path, an electric motor, circuit means for driving the electric motor, means for transmitting the rotation of the electric motor to the revolver, and means for detecting the fluctuation of the load of the electric motor caused by a variation in the rotational torque of the revolver, and means for acting on the circuit means to stop the rotation of the electric motor in response to the detecting means.

    Abstract translation: 一种具有旋转镜的显微镜,其具有安装在其上的物镜并且可旋转以将物镜移动到观察光路中,包括用于当物镜朝向预定位置时改变用于旋转的旋转位置的旋转器的旋转的负载转矩的装置 在观察光路中,电动机,用于驱动电动机的电路装置,用于将电动机的旋转传递到转轮的装置,以及用于检测由电动机的变化引起的电动机的负载的波动的装置 以及用于作用在电路装置上以响应于检测装置停止电动机的旋转的装置。

    Spectrophotometer capable of correcting a dark current
    5.
    发明授权
    Spectrophotometer capable of correcting a dark current 失效
    能够校正暗电流的分光光度计

    公开(公告)号:US4330210A

    公开(公告)日:1982-05-18

    申请号:US69926

    申请日:1979-08-27

    CPC classification number: G01J3/2803 G01J1/18

    Abstract: This specification discloses a dark current correcting device in a spectrophotometer utilizing, as the photoelectric converting element, an image sensor capable of electrical scanning such as a photo-diode array to improve the scanning speed and the reliability, thus eliminating the error component by the dark current from the photoelectric conversion signal obtained from each photoelectric converting element of the image sensor and enabling obtainment of a true photoelectric conversion signal.

    Abstract translation: 本说明书公开了一种使用光电转换元件作为光电二极管阵列的能够进行电扫描的图像传感器的分光光度计中的暗电流校正装置,以提高扫描速度和可靠性,从而消除了黑暗中的误差分量 从图像传感器的每个光电转换元件获得的光电转换信号的电流,并且能够获得真实的光电转换信号。

    Spectrophotometer
    6.
    发明授权
    Spectrophotometer 失效
    分光光度计

    公开(公告)号:US4320971A

    公开(公告)日:1982-03-23

    申请号:US70103

    申请日:1979-08-27

    CPC classification number: G01J3/2803

    Abstract: A spectrophotometer has an image sensor capable of electrically scanning, such as a photo-diode array, as a photoelectrical converting element. A photoelectrical conversion signal is obtained corresponding to an arbitrarily selected wavelength from the signal time-sequentially produced from a one-dimensional image sensor by means of such a simple structure.

    Abstract translation: 分光光度计具有能够电光扫描的图像传感器,例如光电二极管阵列,作为光电转换元件。 通过这种简单的结构,从由一维图像传感器以时间顺序产生的信号中获得对应于任意选择的波长的光电转换信号。

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