- 专利标题: Embedded memory device with a composite top electrode
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申请号: US15362153申请日: 2016-11-28
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公开(公告)号: US09954166B1公开(公告)日: 2018-04-24
- 发明人: Hsing-Lien Lin , Hai-Dang Trinh , Yao-Wen Chang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsu-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsu-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L27/24
摘要:
A memory cell with a composite top electrode is provided. A bottom electrode is disposed over a substrate. A switching dielectric having a variable resistance is disposed over the bottom electrode. A capping layer is disposed over the switching dielectric. A composite top electrode is disposed over and abutting the capping layer. The composite top electrode comprises a tantalum nitride (TaN) layer and a titanium nitride (TiN) film disposed directly on the tantalum nitride layer. By having the disclosed composite top electrode, an interfacial oxidized layer is eliminated or less formed when exposing the composite top electrode for top electrode via formation, thereby improving RC properties between the top electrode and the top electrode via. A method for manufacturing the memory cell is also provided.
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