In the examples provided herein, a device is described that has a stack of structure layers including a first structure layer and a second structure layer that are different materials, where the first structure layer is positioned higher in the stack than the second structure layer. The device also has a first sidewall spacer deposited conformally and circumferentially around an upper portion of the stack that includes the first structure layer. Further, the device has a second sidewall spacer deposited conformally and circumferentially around the first sidewall spacer and an additional portion of the stack that includes the second structure layer, where a height of the first sidewall spacer along the stack is different from a height of the second sidewall spacer.