- 专利标题: Monolithic integration techniques for fabricating photodetectors with transistors on same substrate
-
申请号: US15353532申请日: 2016-11-16
-
公开(公告)号: US09954121B2公开(公告)日: 2018-04-24
- 发明人: Szu-Lin Cheng , Shu-Lu Chen
- 申请人: Artilux, Inc.
- 申请人地址: TW Zhubei
- 专利权人: Artilux Inc.
- 当前专利权人: Artilux Inc.
- 当前专利权人地址: TW Zhubei
- 代理机构: Perkins Coie LLP
- 主分类号: H01L31/105
- IPC分类号: H01L31/105 ; H01L31/02 ; H01L27/144 ; H01L31/18 ; H01L21/8234 ; H01L31/0216 ; H01L29/78 ; H01L31/028 ; H01L21/70 ; H01L21/77 ; H01L31/0232 ; H01L23/522 ; H01L23/532 ; H01L29/06 ; H01L31/0224 ; H01L31/0352
摘要:
Examples of the various techniques introduced here include, but not limited to, a mesa height adjustment approach during shallow trench isolation formation, a transistor via first approach, and a multiple absorption layer approach. As described further below, the techniques introduced herein include a variety of aspects that can individually and/or collectively resolve or mitigate one or more traditional limitations involved with manufacturing PDs and transistors on the same substrate, such as above discussed reliability, performance, and process temperature issues.
公开/授权文献
信息查询
IPC分类: