- 专利标题: Bonding P-type and N-type sheets to form complementary circuits
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申请号: US15375118申请日: 2016-12-11
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公开(公告)号: US09954033B2公开(公告)日: 2018-04-24
- 发明人: Hjalmar Edzer Ayco Huitema
- 申请人: Polyera Corporation
- 申请人地址: US IL Skokie
- 专利权人: FLEXTERRA, INC.
- 当前专利权人: FLEXTERRA, INC.
- 当前专利权人地址: US IL Skokie
- 代理机构: Marshall, Gerstein & Borun LLP
- 主分类号: H01L51/40
- IPC分类号: H01L51/40 ; H01L27/28 ; H01L51/00 ; H01L51/05 ; H01L29/786
摘要:
A method for fabricating at least a portion of a complementary circuit, such as a complementary inverter circuit, includes fabricating a first sheet and a second sheet. Each of the sheets includes metal layers, a dielectric layer, and a semiconductor channel layer, configured so as to form a plurality of transistors of a respective polarity (i.e., P-type for one sheet, N-type for the other). The method also includes placing a layer of conductive material, such as anisotropic conducting glue (ACG) or anisotropic conducting foil (ACF), on the first sheet, and bonding at least a portion of the second sheet to the first sheet such that the conductive material is disposed between and in contact with the top-most metal layers of the first and second sheets. Separately fabricating the two sheets of different polarity may improve yields and/or decrease costs as compared to fabricating both polarities on a single substrate.
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