- 专利标题: Embedded graphite heat spreader for 3DIC
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申请号: US14639942申请日: 2015-03-05
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公开(公告)号: US09953957B2公开(公告)日: 2018-04-24
- 发明人: Guilian Gao , Charles G. Woychik , Cyprian Emeka Uzoh , Liang Wang
- 申请人: Invensas Corporation
- 申请人地址: US CA San Jose
- 专利权人: INVENSAS CORPORATION
- 当前专利权人: INVENSAS CORPORATION
- 当前专利权人地址: US CA San Jose
- 代理机构: Haynes and Boone, LLP.
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L23/367 ; H01L23/373 ; H01L23/00 ; H01L25/00 ; H01L23/36
摘要:
A device with thermal control is presented. In some embodiments, the device includes a plurality of die positioned in a stack, each die including a chip, interconnects through a thickness of the chip, metal features of electrically conductive composition connected to the interconnects on a bottom side of the chip, and adhesive or underfill layer on the bottom side of the chip. At least one thermally conducting layer, which can be a pyrolytic graphite layer, a layer formed of carbon nanotubes, or a graphene layer, is coupled between a top side of one of the plurality of die and a bottom side of an adjoining die in the stack. A heat sink can be coupled to the thermally conducting layer.
公开/授权文献
- US20160260687A1 EMBEDDED GRAPHITE HEAT SPREADER FOR 3DIC 公开/授权日:2016-09-08
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