Tunable active silicon for coupler linearity improvement and reconfiguration
摘要:
An electromagnetic coupler assembly includes a handle wafer having an oxide layer disposed on a first surface thereof. A layer of active semiconductor is disposed on the oxide layer and includes a voltage terminal to receive a supply voltage. A layer of dielectric material is disposed on the layer of active semiconductor. A main transmission line is disposed on the layer of dielectric material. A coupled transmission line is disposed on the layer of active semiconductor and is one of inductively coupled to the main transmission line and capacitively coupled to the main transmission line. At least a portion of one of the main transmission line and the coupled transmission line is disposed directly above at least a portion of the layer of active semiconductor.
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