Invention Grant
- Patent Title: Surface finishes for interconnection pads in microelectronic structures
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Application No.: US14882780Application Date: 2015-10-14
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Publication No.: US09947631B2Publication Date: 2018-04-17
- Inventor: Srinivas V. Pietambaram , Kyu-Oh Lee
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP.
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B23K35/30 ; C22C19/03 ; H05K1/11 ; H05K1/18

Abstract:
A surface finish may be formed in a microelectronic structure, wherein the surface finish may include an interlayer comprising a refractory metal, phosphorus, and nickel, with the refractory metal having a content of between about 2 and 12% by weight and the phosphorus having a content of between about 2 and 12% by weight with the remainder being nickel. In one embodiment, the refractory metal of the interlayer may consist of one of tungsten, molybdenum, and ruthenium. In another embodiment, the interlayer may comprise the refractory metal being tungsten having a content of between about 5 and 6% by weight and phosphorus having a content of between about 5 and 6% by weight with the remainder being nickel.
Public/Granted literature
- US20170110422A1 SURFACE FINISHES FOR INTERCONNECTION PADS IN MICROELECTRONIC STRUCTURES Public/Granted day:2017-04-20
Information query
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