- 专利标题: Methods of graphene growth and related structures
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申请号: US15169557申请日: 2016-05-31
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公开(公告)号: US09923142B2公开(公告)日: 2018-03-20
- 发明人: Miin-Jang Chen , Samuel C. Pan , Chung-Yen Hsieh
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd. , National Taiwan University
- 申请人地址: TW Hsin-Chu TW Taipei
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.,National Taiwan University
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.,National Taiwan University
- 当前专利权人地址: TW Hsin-Chu TW Taipei
- 代理机构: Haynes and Boone, LLP
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; H01L51/00 ; H01L21/02 ; H01L29/66 ; H01L29/16 ; H01L51/05 ; H01L29/06
摘要:
A method and structure for providing uniform, large-area graphene by way of a transfer-free, direct-growth process. In some embodiments, a SAM is used as a carbon source for direct graphene synthesis on a substrate. For example, a SAM is formed on an insulating surface, and a metal layer is formed over the SAM. The metal layer may serve as a catalytic metal, whereby the SAM is converted to graphene following an annealing process. The SAM is deposited using a VPD process (e.g., an ALD process and/or an MLD process). In some embodiments, a CNT having a controlled diameter may be formed on the surface of a nanorod by appropriately tuning the geometry of the nanorod. Additionally, in some embodiments, a curved graphene transistor may be formed over a curved oxide surface, thereby providing a band gap in a channel region of the graphene transistor.
公开/授权文献
- US20170346010A1 METHODS OF GRAPHENE GROWTH AND RELATED STRUCTURES 公开/授权日:2017-11-30
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