- 专利标题: Thermoelement including a three-dimensional microstructure, and method for producing a thermoelement
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申请号: US13499083申请日: 2010-09-20
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公开(公告)号: US09884759B2公开(公告)日: 2018-02-06
- 发明人: Harry Hedler , Jörg Zapf
- 申请人: Harry Hedler , Jörg Zapf
- 申请人地址: DE Munich
- 专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人地址: DE Munich
- 代理机构: Slayden Grubert Beard PLLC
- 优先权: DE102009043414 20090929
- 国际申请: PCT/EP2010/063811 WO 20100920
- 国际公布: WO2011/039070 WO 20110407
- 主分类号: B32B3/00
- IPC分类号: B32B3/00 ; G01K7/02 ; G01K7/08 ; B81B1/00 ; B81B7/00 ; B81B7/02 ; B81B7/04 ; H01L35/32 ; B29C39/00 ; B29C39/02 ; B81C99/00
摘要:
A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.
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