Invention Grant
- Patent Title: Hard material layers with selected thermal conductivity
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Application No.: US14781135Application Date: 2014-03-26
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Publication No.: US09869015B2Publication Date: 2018-01-16
- Inventor: Matthias Lukas Sobiech , Sebastian Stein , Paul Heinrich Böttger , Valery Shklover , Jörg Patscheider
- Applicant: Oerlikon Surface Solutions AG, Trübbach , ETH Zürich , Empa
- Applicant Address: CH Pfäffikon CH Zürich CH Dübendorf
- Assignee: Oerlikon Surface Solutions AG, Pfäffikon,ETH ZÜRICH,EMPA
- Current Assignee: Oerlikon Surface Solutions AG, Pfäffikon,ETH ZÜRICH,EMPA
- Current Assignee Address: CH Pfäffikon CH Zürich CH Dübendorf
- Priority: DE102013005437 20130329
- International Application: PCT/EP2014/000811 WO 20140326
- International Announcement: WO2014/154356 WO 20141002
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/00 ; C23C14/06 ; C23C28/00 ; C23C28/04 ; B23B27/14

Abstract:
A hard material layer system with a multilayer structure, comprising alternating layers A and B, with A layers having the composition MeApAOnANmA in atomic percent and B layers having the composition MeBpBOnBNmB in atomic percent, where the thermal conductivity of the A layers is greater than the thermal conductivity of the B layers. MeA and MeB each comprise at least one metal of the group Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and Al, pA indicates the atomic percentage of MeA and pB indicates the atomic percentage of MeB and the following is true: PA=PB, nA indicates the oxygen concentration in the A layers in atomic percent and nB indicates the oxygen concentration in the B layers in atomic percent and the following is true: nA
Public/Granted literature
- US20160138153A1 HARD MATERIAL LAYERS WITH SELECTED THERMAL CONDUCTIVITY Public/Granted day:2016-05-19
Information query
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