Invention Grant
- Patent Title: Fluoride glazes from fluorine ion treatment
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Application No.: US15418615Application Date: 2017-01-27
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Publication No.: US09850161B2Publication Date: 2017-12-26
- Inventor: Chengtsin Lee , Jennifer Y. Sun
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C03C17/22
- IPC: C03C17/22 ; C03C10/00 ; C03C10/16 ; C03C8/06 ; C03C4/18 ; C03C17/245
Abstract:
An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.
Public/Granted literature
- US20170283313A1 FLUORIDE GLAZES FROM FLUORINE ION TREATMENT Public/Granted day:2017-10-05
Information query
