- 专利标题: Heater supporting device
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申请号: US13101625申请日: 2011-05-05
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公开(公告)号: US09779970B2公开(公告)日: 2017-10-03
- 发明人: Tetsuya Kosugi , Hitoshi Murata , Shinobu Sugiura , Masaaki Ueno
- 申请人: Tetsuya Kosugi , Hitoshi Murata , Shinobu Sugiura , Masaaki Ueno
- 申请人地址: JP Tokyo
- 专利权人: HITACHI KOKUSAI ELECTRIC INC.
- 当前专利权人: HITACHI KOKUSAI ELECTRIC INC.
- 当前专利权人地址: JP Tokyo
- 代理机构: Volpe and Koenig, P.C.
- 优先权: JP2010-108968 20100511; JP2011-058673 20110317
- 主分类号: H01L21/22
- IPC分类号: H01L21/22 ; H01L21/67
摘要:
A heater supporting device for use in a semiconductor manufacturing apparatus is provided so as to improve the uniformity of a temperature property and the expected lifespan by preventing support pieces from being damaged and separated from piece holders, and preventing deterioration in adiabatic efficiency in the vicinity of a ceiling of a vertical type furnace. A heating element of a coil shape is disposed around an object. The support pieces are vertically connected in multiple. Hollows of an elliptical shape are formed between the respective support pieces. Concave insertions are formed on one of upper and lower surfaces of the respective support pieces, and convex insertions are formed on the other one of the upper and lower surfaces of the respective support pieces. The convex insertions are insert-fitted with the concave insertions. The support pieces are vertically connected in multiple by insert-fitting the concave insertions to the convex insertions.
公开/授权文献
- US20110281226A1 HEATER SUPPORTING DEVICE 公开/授权日:2011-11-17
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