Invention Grant
- Patent Title: End effector for transferring a substrate
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Application No.: US14336650Application Date: 2014-07-21
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Publication No.: US09721820B2Publication Date: 2017-08-01
- Inventor: Michael S. Cox , Michel Anthony Rosa
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/677
Abstract:
Embodiments of the present invention provide an end effector capable of generating an electrostatic chucking force to chuck a substrate disposed therein without damaging the substrate. In one embodiment, an end effector for a robot, the end effector includes a body having an electrostatic chucking force generating assembly, and a mounting end coupled to the body, the mounting end for coupling the body to the robot.
Public/Granted literature
- US20150022935A1 END EFFECTOR FOR TRANSFERRING A SUBSTRATE Public/Granted day:2015-01-22
Information query
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