- 专利标题： End effector for transferring a substrate
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申请号： US14336650申请日： 2014-07-21
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公开(公告)号： US09721820B2公开(公告)日： 2017-08-01
- 发明人: Michael S. Cox , Michel Anthony Rosa
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/677
摘要：
Embodiments of the present invention provide an end effector capable of generating an electrostatic chucking force to chuck a substrate disposed therein without damaging the substrate. In one embodiment, an end effector for a robot, the end effector includes a body having an electrostatic chucking force generating assembly, and a mounting end coupled to the body, the mounting end for coupling the body to the robot.
公开/授权文献
- US20150022935A1 END EFFECTOR FOR TRANSFERRING A SUBSTRATE 公开/授权日：2015-01-22
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