Invention Grant
- Patent Title: Patterning of electroless metals by selective deactivation of catalysts
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Application No.: US14918227Application Date: 2015-10-20
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Publication No.: US09699914B2Publication Date: 2017-07-04
- Inventor: Mihir Reddy , Michael Riley Vinson , Sunity K. Sharma
- Applicant: Averatek Corporation
- Applicant Address: US CA Santa Clara
- Assignee: AVERATEK CORPORATION
- Current Assignee: AVERATEK CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Tsang, LLP
- Main IPC: H05K1/09
- IPC: H05K1/09 ; H05K3/18 ; C23C18/00

Abstract:
Methods and devices for patterning electroless metals on a substrate are presented. An active catalyst layer on the substrate can be covered with a patterned mask and treated with a deactivating chemical reagent, which deactivates the catalyst layer not covered by the mask. Once the patterned mask is removed, the electroless metal layer can be placed to have a patterned electroless metals. Alternatively, a substrate can be coated with a blocking reagent in a pattern first to inhibit formation of the catalyst layer before a catalyst layer can be placed over the blocking agent layer and then electroless metal layer is placed on the catalyst layer. The pattern of the blocking reagent acts as a negative pattern of the final conductive line pattern.
Public/Granted literature
- US20160113121A1 PATTERNING OF ELECTROLESS METALS BY SELECTIVE DEACTIVATION OF CATALYSTS Public/Granted day:2016-04-21
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