Invention Grant
- Patent Title: Method for producing thin film containing molybdenum
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Application No.: US14421154Application Date: 2013-10-15
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Publication No.: US09695207B2Publication Date: 2017-07-04
- Inventor: Hiroki Sato , Junji Ueyama
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Young & Thompson
- Priority: JP2012-253276 20121119
- International Application: PCT/JP2013/077889 WO 20131015
- International Announcement: WO2014/077073 WO 20140522
- Main IPC: C23C16/06
- IPC: C23C16/06 ; C07F17/00 ; C23C16/18 ; C23C16/40 ; C07F11/00 ; C23C16/44 ; C23C16/455

Abstract:
In the method of the present invention for producing a thin film, including introducing, onto a substrate, a vapor that has been obtained by vaporizing a thin-film-forming material including a molybdenum imide compound represented by the following formula (I) and that includes the molybdenum imide compound; and then forming a thin film including molybdenum on the substrate by decomposing and/or chemically reacting the molybdenum imide compound. (In the formula, R1 though R10 each represent a hydrogen atom or a linear or branched alkyl group having 1 to 5 carbon atoms, and R11 represents a linear or branched alkyl group having 1 to 8 carbon atoms.)
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